KEYENCE

SI-F80R

Product type: SI-F80R

Sensor Head, Wafer Thickness Measurement Type

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Price: Please send request
Request Lead Time: app. 1 Day
Delivery Time: by agreement Estimated delivery time to our warehouse in Berlin
Delivery Terms: FCA Berlin individually for each client according to INCOM TERMS 2025

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Product Specifications

Product Attribute	Attribute Value
Weight	0.07 KG / psc.
Commodity number
Country of origin
Dimensions (WxHxD)
EAN code
Product group
Model	SI-F80R *1
Type	Wafer thickness measurement type Sensor head
Measurement range	10 to 310 µm 0.000394" to 0.0122" (when n=3.5) *2
Possible detection distance	80 to 81.1 mm 3.15" to 3.19"
Light source	Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *3 )
Spot diameter	ø25 µm ø0.000984" *4
Linearity	±0.1 µm ±0.000004" (when n=3.5) *5
Resolution	0.001 µm *6
Sampling cycle	200 µs
LED display	Target near center of measurement range : green lights. Target within measurement range : orange lights. Target outside measurement range : flashes orange.
Temperature fluctuation	―
Ambient light	Incandescent lamp or Fluorescent lamp: 10,000 lux max.
Ambient temperature	0 to +50 °C 32 to 122 °F
Relative humidity	35 to 85 % RH (No condensation)
Vibration resistance	10 to 55 Hz, Double amplitude 1.5 mm 0.06" , 2 hours in each of the X, Y, and Z directions
Material	SUS
Enclosure rating	IP64