| Weight | 1.2 KG / psc. |
| Commodity number | |
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| Dimensions (WxHxD) | |
| EAN code | |
| Product group | |
| Model | SI-F80RU |
| Type | Wafer Thickness Measurement Type Spectrum Unit |
| Measurement range | 10 to 310 µm 0.000394" to 0.0122" (when n=3.5) *1 |
| Possible detection distance | 80 to 81.1 mm 3.15" to 3.19" |
| Light source | Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *2 ) |
| Spot diameter | ø25 µm *3 |
| Linearity | ±0.1 µm ±0.000004" (when n=3.5) *4 |
| Resolution | 0.001 µm *5 |
| Sampling cycle | 200 µs |
| LED display | Target near center of measurement range : green lights. Target within measurement range : orange lights. Target outside measurement range : flashes orange. |
| Temperature fluctuation | 0.01% of F.S./°C |
| Ambient light | Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
| Ambient temperature | 0 to +35 °C 32 to 95 °F |
| Relative humidity | 35 to 80 % RH (No condensation) |
| Vibration resistance | 10 to 55 Hz, Double amplitude 0.5 mm 0.02" , 2 hours in each of the X, Y, and Z directions |
| Material | Polycarbonate |
| Enclosure rating | - |