KEYENCE

SI-F80RU

Product type: SI-F80RU

Spectroscopy Unit

  • Measurement Sensors
  • Spectral Interference Displacement Sensor
  • Spectral-Interference Wafer Thickness Meter
  • Models
  • Spectroscopy Unit
Contact Person
Thomas Hoffmann
+49 305 201 4443
sales@zwodltd.com
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Additional Information
Price: Please send request
Request Lead Time: app. 1 Day
Delivery Time: by agreement
Estimated delivery time to our warehouse in Berlin
Delivery Terms: FCA Berlin
individually for each client according to INCOM TERMS 2025
Multiples Of: 1
Product Specifications
Product AttributeAttribute Value
Weight1.2 KG / psc.
Commodity number
Country of origin
Dimensions (WxHxD)
EAN code
Product group
Model SI-F80RU
Type Wafer Thickness Measurement Type Spectrum Unit
Measurement range 10 to 310 µm 0.000394" to 0.0122" (when n=3.5) *1
Possible detection distance 80 to 81.1 mm 3.15" to 3.19"
Light source Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *2 )
Spot diameter ø25 µm *3
Linearity ±0.1 µm ±0.000004" (when n=3.5) *4
Resolution 0.001 µm *5
Sampling cycle 200 µs
LED display Target near center of measurement range : green lights. Target within measurement range : orange lights. Target outside measurement range : flashes orange.
Temperature fluctuation 0.01% of F.S./°C
Ambient light Incandescent lamp or Fluorescent lamp: 10,000 lux max.
Ambient temperature 0 to +35 °C 32 to 95 °F
Relative humidity 35 to 80 % RH (No condensation)
Vibration resistance 10 to 55 Hz, Double amplitude 0.5 mm 0.02" , 2 hours in each of the X, Y, and Z directions
Material Polycarbonate
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